NTEGRA – Modular SPM (AFM, STM) system | NT-MDT SI


The only open design AFM that delivers infinite capabilities

The only open design AFM that delivers infinite capabilities


General information

NTEGRA is a multifunctional device for performing the most typical tasks in the field of Scanning Probe Microscopy. The device is capable of performing more than 40 measuring methods, what allows analyzing physical and chemical properties of the surface with high precision and resolution. It is possible to carry out experiments in air, as well as in liquids and in controlled environment.

The new generation electronics provides operations in high-frequency (up to 5MHz) modes. This feature appears to be principal for the work with high-frequency AFM modes and using high-frequency cantilevers.*

There are several scanning types implemented in NTEGRA : scanning by the sample, scanning by the probe and dual-scanning. On account of that, the system is ideal for investigating small samples with ultra-high resolution (atomic-molecular level) as well as for big samples and scanning range up to 100x100x10 µm.

The unique DualScan TM mode allows investigating even bigger fields on the surface (200x200 µm for X, Y and 22 µm for Z) that can be useful, for example, for living cells and MEMS components.

Built-in three axes closed loop control sensors trace the real displacement of the scanner and compensate unavoidable imperfections of piezoceramics as non-linearity, creep and hysteresis. The sensors, which are used by NT-MDT, have the lowest noise level, thus allowing working with closed loop control on the very small fields (down to 10x10 nm). This is especially valuable for carrying out nanomanipulation and lithography modes. NTEGRA has a built-in optical system with 1 µm resolution, which allows imaging the scanning process in real-time.

Due to the open architecture, the functionality of NTEGRA can be extended essentially: specialized magnetic measurements with external magnetic field, high-temperature experiments, Near-field optical microscopy, Raman spectroscopy, etc.

* E.g. the unique method of Atomic-Force Acoustic Microscopy (AFAM) allows investigating soft and hard samples with carrying out quantitative measurements of Young modulus in every scanning point. AFAM allows obtaining much better contrast as compared to Phase Imaging Mode for the soft objects, and makes possible the obtainment of contrast on the hard samples, what is a very hard task when one uses other methods.


  • Biology and Biotechnology
    Proteins, DNA, viruses, bacteriums, tissues
  • Materials Science
    Surface morphology, surface morphology, local piezoelectric properties, local adhesion properties, local tribological properties
  • Magnetic materials
    Magnetic domain structure visualization, observation of magnetization reversal processes that depend on external magnetic field, observation of magnetization reversal processes under different temperatures
  • Semiconductors, electric measurements
    Wafers and other structures morphology, local surface potential and capacitance measurements, electric domain structure imaging, determination of heterojunction bounds and semiconductor regions with different doping levels, failure analysis (localization of conductor line failure and leakage in dielectric layers)
  • Polymers and Thin Organic Films
    Spherulites and dendrites, polymer monocrystals, polymer nanoparticles, LB‑films, thin organic films
  • Data storage devices and medias
    CD, DVD disks, storages for terabit memories with thermomechanical, electric and other types of recording
  • Nanomaterials
    Nanopowders, nanocomposites, nanoporous materials
  • Nanostructures
    Fullerenes, nanotubes, nanofilaments, nanocapsules
  • Nanoelectronics
    Quantum dots, nanowires, quantum structures
  • Nanomachining
    AFM lithography: force (ac and dc), current (Local anodic oxidation), STM lithography
  • Nanomanipulations
    Contact force


PM-KPFM map overlaid over topography of F14H20 fluroalkanes self-assembly structures on Si. Scan size: 5x5 um

Perovskite nanosheets (CsPbBr3) spin-coated onto MoS2 film. Size: 6x6x0,4 um

Polystyrene spheres coated with golden film. AFM imaging done by means of ScanT. Scan size: 2,5x2,5 um

PFM Amplitude map of Ferroelectric Domains in DyMnO3. Scan size 6x6 um

Adhesion map of bitumen surface reveals areas of high (yellow) and low (purple) levels of adhesion. Scan size: 10x10 um

STM image of HOPG topography done with speed of 0,5 Hz in Thermo Cabinet. Scan size: 2,5x2,5 nm

DualScan image of calibration grating (3um period). Scan size: 200x200 um

Surface Potential of sPS-PVDF polymer blend. Single-pass PM-KPFM. Scan size: 9x9 um


Scan type Scanning by sample Scanning by probe
Sample size Up to ⌀40 mm, up to 15 mm in height Up to ⌀100 mm in diameter, up to 15 mm in height
Sample weight Up to 100 g Up to 300 g
XY sample positioning range, resolution 5x5 mm, 5 μm
Positioning sensitivity 2 μm
Scan range 100x100x10 μm 100x100x10 μm
Up to 200x200x20 μm (DualScanTM mode)
Non linearity, XY ≤ 0.1% ≤ 0.15%
Noise level, Z
(RMS in bandwidth 1000 Hz)
0.04 nm (typically), 0.06 nm 0.06 nm (typically), 0.07 nm
Noise level, XY
(RMS in bandwidth 200 Hz)
0.2 nm (typically), 0.3 nm (XY 100 um) 0.1 nm (typically), 0.2 nm (XY 50 um)
Optical viewing system Optical resolution 3 μm
(1μm optional;
0.4 μm optional, NA 0.7)
3 μm
Field of view 4.5-0.4 mm 2.0-0.4 mm
Continuous zoom available available
Vibration isolation Active  0.7-1000 Hz

Measuring modes and techniques

Contact AFM: Topography, Lateral Force, Force Modulation, Spreading Resistance Imaging
Amplitude modulation AFM: Topography, Phase, Feedback
HybriD mode AFM: Topography, Young’s modulus, Work of Adhesion, Viscoelectisity, Current, Piezoresponse Force Microscopy, Fast Force Volume
AFM spectroscopy: Force-distance, Amplitude-distance, Phase-distance, I(V), I(Z)
Magnetic Force Microscopy: Two-pass and Frame Lift DC/AC
Electrostatic Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation
Scanning Capacitance Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation (dC/dZ and dC/dV imaging)
Kelvin Probe Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Phase Modulation
Piezoresponse force microscopy & Switching Spectroscopy
Nanolithography: Voltage, Current, Force

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