LAO Nanolithography

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LAO Nanolithography was made on Ti film in Semicontact mode by means of local anodic oxidation.
Substrate with Mona Lisa nanoportrait was sent to Internactional Space Station.

LAO Nanolithography

size: 8x8x0.007 um
SPM principle: Intermittent contact mode

AFM Lithography by Local Probe Oxidation

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