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AFM Lithography by Local Probe Oxidation

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film on silicon wafer. NTEGRA Aura with DCP11 probe was used.


valentino_n300
valentino_n300
AFM Lithography by Local Probe Oxidation


size: 1.6x2.0x0.005 um
SPM principle: AFM Oxidation Lithography
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