Microchip

150 mm silicon wafer
Device: VEGA
Tip: Whisker
Sample Courtesy: V. Novak
Image Courtesy: A. Kalinin

microchip_70x70_um_s

Microchip

size: 70x70 um
SPM principle: Amplitude modulation AFM

optical

Optical view

microchip_70x70_um1

Topography

CeO2 deposed on Ni-W

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