GaAs/GaAlAs MOCVD Superlattice

SFM image of the GaAs/GaAlAs MOCVD superlattice.
Image courtesy of M.Eremtchenko, State Research Institute of Physical Problems & NT-MDT, Moscow, Russia.

V.A.Fedirko, V.A.Bykov, M.D.Eremtchenko, V.I.Shashkin and V.M.Daniltzev. Characterization of
GaAs/GaAlAs MOCVD Superlattice by STM/AFM Technique. Russian Academy of Siences. Abstracts of
Invited Lectures and Contributed Papers, St Petersburg, Russia, 24-28 June 1996, pp.. 381-384.

SFM image of the GaAs/GaAlAs MOCVD superlattice.

Image courtesy of M.Eremtchenko, State Research Institute of Physical Problems & NT-MDT, Moscow, Russia.

V.A.Fedirko, V.A.Bykov, M.D.Eremtchenko, V.I.Shashkin and V.M.Daniltzev. Characterization of
GaAs/GaAlAs MOCVD Superlattice by STM/AFM Technique. Russian Academy of Siences. Abstracts of
Invited Lectures and Contributed Papers, St Petersburg, Russia, 24-28 June 1996, pp.. 381-384.
size: 1.5x1.3 um
SPM principle: Constant Force mode

Array of ordered Ge(Si) pyramids

AlGaN/GaN superlattice cross-section

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