AFM - Raman - SNOM
Modular AFM
Automated AFM
Practical AFM
Model line
NTEGRA Spectra NTEGRA Spectra – AFM-Raman-SNOM system. NT-MDT – AFM-probes, atomic force microscope (AFM, HybriD Mode, STM, SPM, RAMAN, SNOM SPECTRUM SPECTRUM - Automated AFM-Raman-SNOM system for a wide range of applications NTEGRA Spectra II


Automated AFM-Raman-SNOM system
for a wide range of applications

SPECTRUM Brochure (11 Mb)


General information

The World’s first fully automated AFM-Raman-SNOM instrument. Integration of AFM with multiple optical techniques: confocal Raman/fluorescence microscopy, SNOM, TERS etc. Comprehensive sample characterization on the nanoscale – easy and fast.

  • Simultaneous AFM and confocal Raman imaging using different objectives (up to 100x).
  • Free rotation of microscope turret (up to 4 objectives) with AFM probe on the sample.
  • Automated removal of AFM probe (for low working distance objectives or when AFM probe is not required).


  • HotSpot – Automatic location of active TERS* region on the probe.
  • Fully automated and easy to use operation.
* Tip Enhanced Raman Scattering.


Step 1 Sample survey (with cantilever removed). High resolution and wide field of view.

Step 2 Simultaneous AFM and confocal Raman/Fluorescence imaging of selected area.

Up to 4 objectives can be installed into the turret of the commercial optical microscope.
All standard imaging modes are supported.
  Some AFM modes may require different cantilevers.
Easy probe exchange and automated approach allows any advanced AFM mode (>30 modes) to be readily used together with Raman.
    Topography Overlap of PS and PVAC Raman images

Cantilever automatically
moves to the working
position and lands
    Surface potential Rayleigh scattering


The new SPECTRUM instrument was developed based on NT-MDT more than 15 years experience in building AFM - Raman – SNOM systems. The unique features include: full automation, advanced AFM capabilities, complete integration with optical techniques.

Unique integration of SPM with optics for AFM - Raman - SNOM – TERS

  • Upright or Full Transmission configuration.
  • Upright microscope with 4 position revolving turret. Possibility to install up to 4 different objectives starting from the lenses for large area visualization to high numerical aperture objectives for high optical resolution,
  • Scanning by laser spot. This option is provided by very stable scanner-mirror with closed loop capacitance sensors. Latter allows to position the laser spot with a high precision on the tip apex.
  • Fiber or direct input/output of the excitation laser/registered signal. Specially designed optical mechanical unit allows to input the incident laser by using high transmission optical fiber and output the collected signal through the fiber directly to the monochromator. Otherwise it is possible to couple directly SPECTRUM system with commercially available spectrometers (Solar, Renishaw).
  • SNOM. Due to Full Transmission configuration it is possible to perform aperture and apertureless SNOM using cantilever or fiber probes


  • Sample movement.
  • Laser/cantilever/photodiode system alignment.
  • Automatic removal of AFM probe (when low working distance objectives are used or when AFM probe is not required).
  • Probe approach & retraction.
  • Scanning parameters adjustment.

Unique SPM capabilities

  • Low noise. Sample scanning with resolution down to atomic.
  • Large sample size (up to 50mm×50mm). Special sample holder for slides (75mm×25mm).
  • AFM, STM and tuning fork operation; measurements in liquid.
  • More than 30 advanced SPM modes supported - together with Raman. 
Tuning fork tip holder
AFM tip holder
STM tip holder
Holder for operation in liquid

System design & configurations

Fully integrated & optimized AFM-Raman-SNOM-TERS system immersed into an easy-to-use, compact design.

System design

  1. Specialy designed OMU with optical viewing system and scanner-mirror
  2. Mitutoyo Upright microscope
  3. 4 position turret 100х objective
  4. SPM head with tip holder and AFM cntilever deflection system
  5. SPM base wich includes: Piezo Scan Stage (100x100x10 um) Motorized Stage (35x35 mm) Manual positioner of SPM head (3x3 mm) Motorized and Piezo drives for Z objective (optional) Heating stage (optional)
  6. SNOM unit (optional)

Optical configurations

Upright+Scanner-mirror (Standart configuration).

  1. Dual Scanning system (3 independent closed-loop scanning axes by sample + 2 by laser spot)
  2. Designed for nontransparent samples
  3. Optical resolution down to 400 nm symultaneously with AFM
  4. Signal collection is performed by high numerical apperture objective simultaneously with AFM
  5. Laser scanning for automatic location of active TERS region on the probe
  6. Equipped with heating stage.

Configuration with SNOM unit (Optional).

  1. Special unit for fiber input/output.
  2. Piezo- and motorized drives for bottom objective.
  3. Objectives with different magnifications can be used.
  4. Detection with PMT of the signal collected by the bottom objective (Transmission mode).
  5. Exitation with laser from the bottom, collection of the signal by the cantilever aperture and registration with the spectrometer detectors (Collection mode).


Sample survey with high resolution. Automated high resolution AFM - Raman imaging without limitations of the piezo-scanner range.

  1. Choosing area on the sample (any size, no limitations of the scanner).
  2. Automated AFM probe approach.
  3. Simultaneous measurement of AFM and confocal Raman/fluorescence maps from multiple areas (automated).
  4. Image stiching (automated).



High-precision positioning motors allow to automate basic operations, including the adjustment of the OBD system, positioning of measuring heads and sample, etc.

Automated sample positioning (35×35 mm)*

High precision positioning motors equipped with optical sensors allow automated AFM-Raman imaging of any sample areas (within 35mm×35mm travel range).
  Cantilever deflection system auto alignment

In several seconds get the laser aligned to the tip and photodiode position optimized. Special algorithms give a high precision and high speed of cantilever deflection system alignment.




  • Graphene, carbon nanotubes and other carbon materials
  • Semiconductor devices
  • Nanotubes, nanowires, quantum dots and other nanoscale materials
  • Polymers
  • Optical device characterization: semiconductor lasers, optical fibers, waveguides, plasmonic devices
  • Investigation of cellular tissue, DNA, viruses and other biological objects
  • Chemical reaction control


Mo oxide nanowires, 5 ×5 µm   CdS nanowires, 4 ×4 µm
Mo oxide Raman peak
Fluorescense image
Overlapped Raman image
from CdS and PANI
Artificial diamond characterization, 2 ×2 µm Graphene, 5 ×5 µm
AFM topography
Raman mapping of intensity
of 1333 1/cm band
Raman map of 2D-band
Raman map of G-band




Measuring modes and techniques

AFM (contact and amplitude modulation), AFM spectroscopy, AFM lithography (force, current, voltage), Raster Spring Imaging, Lateral Force Microscopy, Force Modulation Microscopy, Scanning Spreading Resistance Microscopy, Piezoresponse Force Microscopy and Switching Spectroscopy, EFM, Kelvin Probe Force Microscopy, MFM, STM (microscopy, spectroscopy, lithography).

Confocal Fluorescence microscopy, Confocal Raman microscopy, Confocal Rayleigh microscopy, TERS, TEFS, Wide field optical microscopy, SNOM (all types of probes, all modes).

Measuring heads
  • AFM,STM and Tuning Fork
  • Laser based cantilever deflection detection system automated adjustment and targeting
  • Dimensions: up to 50/10 mm in diameter/height
  • Sample weight: up to 2 kg
  • Heating: from RT to 150 °С
Scanning system
  • Scanning type: by sample
  • Range: 100x100×10 μm (CL)
  • Noise XY: no more 0.3 nm (with closed loop sensors)
  • Noise Z (RMS, 10-1000 Hz bandwidth): 0.06 nm (typical)
Sample positioning system
  • Movement: automated, binded with the videomicroscope
  • Range XY: 35x35 mm; 5×5 mm while using with the bottom objective
  • Min. step: 0.35 μm
  • Repositioning precision: 3 μm
  • Automated approach by tip
  • Range: 10 mm
  • Active vibration isolation system
  • Optical table (optional)
Optical parts
  • Spectral range*: 450-1050 nm
  • Spectral resolution: Depends on the grating and spectrometer used
  • Objectives:
    100x 0.7NA
    10x 0.28NA
    Any other objective (optional)
  • Detectors**:
    TE cooled (down to -100 °C) CCD camera.
    EMCCD camera is optional.
    Photon multiplier (PMT) or avalanche
    photodiode (APD) in photon counting mode or other type of CCD camera (UV, IR)
    Photon multiplier for fast confocal laser
    (Rayleigh) imaging
  • Confocal maps resolution***:
    with the probe, for blue laser with 100x 0.7NA
    XY: <400 nm
    Z: <800 nm
    without the probe, for blue laser with 100x 0.95NA
    XY: <250 nm
    Z: <500 nm
  • Bottom objective (optional)
    Movement: motor and piezo (optional)
    Range: 25 mm by motor, 100 μm by piezo
    Min. step: 0.1 μm by motor, 3 nm by piezo
    * Other spectral range available upon request.
    **Depends on the system configuration




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